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SU-8 TF 6000 Permanent Photo-patternable Epoxies
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SU-8 TF 6000 is a high-contrast, chemically amplified, negative tone epoxy-based resist that is sensitive to broadband UV radiations (i-, h- and g-Line) and is recommended wherever high resolution, photoimageable, thin, permanent structures are required. SU-8 TF 6000 is available in five standard viscosities to achieve low defect coatings with film thicknesses ranging from ~ 0.4 to 16 µm in a single coat process.