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PermiNex® 1000 & 2000 Permanent Photo-patternable Epoxies
5µm features in 15µm thick PermiNex® 1000 Source: Kayaku Advanced Materials

Kayaku Advanced Materials, Inc. PermiNex® 1000 and 2000 resists are epoxy based, photo-imageable bonding resist used as an adhesive layer for the definition and capping of cavity structures such as BAW, SAW, microfluidic devices, and others, where critical alignment, low temperature processing and high bond quality are desired.